canning probe-based multi-scale surface profile measurement technique for various microstructures, including the novel high aspect ratio probe, has achieved rapid measurement of high step microstructure with 90°steep sidewall.
High-efficiency ultrasonic stereovision measurement techniques for microsystems, together with the capability of simultaneous determination of the material's multi-parameters.
Key Technology and Achievements：
Multi-scale and ultraprecision surface profile measurement technique for mico-nano systems was achieved, with a scanning range of 25 mm and a lateral resolution of 50 nm and precision measurement capability of high step microstructure with 90°steep sidewall, which is so far the best in the world.
Coordinated control strategy of the scanner was first proposed which can improve the scanning efficiency by 30% that compared with the other techniques.
An precision auto-focus method and two-dimensional reflection spectrum based fitting technique were proposed to simultaneously measure the multi parameters of the material used in microsystems, which is a big breakthrough as compared with the conventional techniques.
We have 15 papers published in renowned international Journals, including Review of Scientific Instruments、Sensors and Actuators-A and Journal of Applied Physics, which have been cited over 20 times by others within 3 years.