Ultra-pure Water System Experimental System
Prototype of 3-DOF Measuring System Observing Structure in 2D Scanning Motion Platform
Key Technology and Achievements：
Address some major technical problems in Immersion Unit, such as: dynamic sealing, liquid purification, fluid transfer and control, and system integration. Access to innovative results in the field of design, testing and control of Immersion Unit.
Supported by National Science and Technology Major Project
14 Invention patents，15 published papers, therein, 10 SCI/EI indexed papers