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邮箱:xiejin@zju.edu.cn

谢金

教授,博导

教育背景

  • 博士,新加坡南洋理工大学,2008

  • 硕士,浙江大学,2003

  • 学士,清华大学,2000

个人简介

谢金教授2008年于新加坡南洋理工大学机械与航天工程学院获博士学位。2007年9月至2011年5月在新加坡微电子研究院担任研究员(Scientist),2011年6月至2012年7月在美国加州大学伯克利分校机械系担任博士后研究员, 是Berkeley Sensor & Actuator Center(BSAC) 的研究成员。于2012年入选国家“青年千人计划”,并从2012年10月起担任浙江大学机械工程学系教授,博士生导师。主要研究方向为微机械电子系统(MEMS) 设计与加工, 微传感器和驱动器等。

研究方向

  • 微机械电子系统(MEMS),微传感器和驱动器

  • 振动和声学测量

  • 精密测量

任职经历

2012.10 – 现在浙江大学教授
2011.6 – 2012.7美国加州大学伯克利分校博士后研究员
2007.9 – 2011.5新加坡微电子研究院研究员 (Research Scientist)

重要奖项

  • 国家“青年千人计划” 2012

  • 浙江省特聘专家

学术活动

在国际会议International Conference on BioElectronics,BioSensors, BioMedical Devices, BioMEMS/NEMS and Applications 2012 (Bio4Apps 2012) 中担任技术程序委员会委员

在国际会议IEEE NEMS 2015中担任分会主席

重要专利

一种带有柔性杠杆的MEMS谐振式电荷传感器,发明专利,201410195031.7, 发明人:谢金,赵久烜

一种高分辨率和宽动态范围的MEMS谐振式电荷传感器, 发明专利,201510565524.X,发明人:谢金,赵久烜,倪晟,丁弘

一种基于3D打印技术的虚拟冲撞器与颗粒分离与浓度检测器,实用新型专利,201620113634.2,发明人:谢金,赵久烜,赵冉,刘旻亮

重要论文

Journal papers: (*:corresponding author)

[34] Hong Ding, Wen Wang, Bing-Feng Ju and Jin Xie*, "A MEMS Resonant Accelerometer with Sensitivity Enhancement and Adjustment Mechanisms", Journal of Micromechanics and Microengineering, 27 (2017) 115010.

[33] Xianhao Le, Xiaoyi Wang, Jintao Pang, Yingjun Liu, Bo Fang, Zhen Xu, Chao Gao, Yang Xu, Jin Xie*,"A high performance humidity sensor based on surface acoustic wave and graphene oxide on AlN/Si layered structure", Sensors and Actuators B (Chemical), accepted for publication.

[32] Yong Wang, Zhonggui Xu, Yinshen Wang and Jin Xie*,"A Study on AIN Film-Based SAW Attenuation in Liquids and Their Potential as Liquid Ethanol Sensors", Sensors, 17(8), 2017, p1813.

[31] Hong Ding, Xianhao Le and Jin Xie*,"A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator with Selectable Higher Modes", IEEE/ASME Journal of Microelectromechanical Systems, v26, n24, 2017.

[30] Dongyang Chen, Jiuxuan Zhao, Yinshen Wang and Jin Xie*,"An Electrostatic Charge Sensor Based on Micro Resonator with Sensing Scheme of Effective Stiffness Perturbation",  Journal of Micromechanics and Microengineering, 27 (2017) 065002.

[29] K. Shehzad, T. Shi, A. Qadir, X. Wan, H. Guo, A. Ali,Jin Xie,Y. Dan, T. Hasan, P. Tan, Y. Xu*, and X. Duan,  Designing an Efficient Multi-Mode Environmental Sensor based on Graphene-Silicon Heterojunction, Advanced Materials Technologies, 2017, 1600262. 

[28] Yixiang Wang, Hong Ding, Xianhao Le, Wen Wang and Jin Xie*,"A MEMS piezoelectric In-plane Resonant Accelerometer Based on Aluminum Nitride with Two-stage Micro-leverage Mechanism", Sensors and Actuators A, 2017, 254: 126-133.

[27] Zebing Mao, Jiuxuan Zhao, Weipeng Xuan, Wenbo Wang, Jikui Luo and Jin Xie*, Distilling determination of water content in hydraulic oil with a ZnO/glass surface acoustic wave device, Microsystem Technologies, v23,n4,2017.

[26]Dongyang Chen, Jiuxuan Zhao, Zhonggui Xu and Jin Xie*, "A micro resonant charge sensor with enhanced sensitivity based on differential sensing scheme and leverage mechanisms", AIP Advances 6, 105106 (2016).

[25] Jiuxuan Zhao, Minliang Liu, Liang Liang, Wen Wang, Jin Xie*, "Airborne Particulate Matter Classification and Concentration Detection Based on 3D Printed Virtual Impactor and Quartz Crystal Microbalance Sensor", Sensors and Actuators A, 238 (2016) 379–388.  

[24] Hong Ding, Jiuxuan Zhao, Bing-Feng Ju and Jin Xie*, "A High-Sensitivity Biaxial Resonant Accelerometer with Two-stage Microleverage Mechanisms", Journal of Micromechanics and Microengineering,26 (2016) 015011.

[23] Hong Ding, Jiuxuan Zhao, BingFeng Ju, Jin Xie*, “A new analytical model of singlestage microleverage mechanism in resonant accelerometer”, Microsystem Technologies,22(4), 757-766, 2016. 

[22] Jiuxuan Zhao, Hong Ding, Wen Wang and Jin Xie*,"Analysis and System-level Simulation of a Micromachined Resonant Charge Sensor with Microleverage Mechanisms", Sensors and Materials,Vol. 27, No. 11 (2015) 1059–1070.

[21] Jiuxuan Zhao, Hong Ding, Jin Xie* , “Electrostatic charge sensor based on a micromachined resonator with dual micro-levers”, Applied Physics Letters, 106, 233505, 2015.

[20] Wang Chen, Yanlong Cao, Jin Xie*, “Piezoelectric and Electromagnetic Hybrid Energy Harvester for Powering Wireless Sensor Nodes in Smart Grid”, Journal of Mechanical Science and Technology, 29 (10) (2015) 4313~4318.

[19] Jin Xie*, “Fabrication challenges and test structures for high-aspect-ratio SOI MEMS devices with refilled electrical isolation trenches”, Microsystem Technologies, v 21, issue 8, pp 1719-1727, 2015.

[18] Jin Xie*, Shih-Fu Ling, “Electrical impedance as signal to monitor healthy state of eardrum-like membranes”, Journal of Mechanical Science and Technology, 27 (8) (2013) 2237~2243

[17] Jin Xie*, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai, “A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes,” Microsystem Technologies, v18, 325–332, 2012.

[16] Jin Xie* and Shih-Fu Ling, “A Method of Measuring the Acoustic Absorption Coefficient of a Material Specimen at One End of a Tube Using a Dynamic Microphone at the Other End,” Journal of Mechanical Science and Technology, 26 (3) (2012) 1~8.

[15] Kah How Koh, Takeshi Kobayashi, Jin Xie, Aibin Yu and Chengkuo Lee, “Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications,” Journal of Micromechanics and Microengineering, 21 (2011) 075001.

[14] Jin Xie*, Rahul Agarwal, Kia Hian Lau, Youhe Liu and Julius M. Tsai, "Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes," Advanced Materials Research, vol 254 (2011) pp 203-206

[13] Keanlee Kang, Jin Xie*, Julius Minglin Tsai,"A new robust four degree-of-freedom gyroscope design," Advanced Materials Research, vol 254 (2011) pp 199-202.

[12] Jin Xie*, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai, Nagarajan Ranganathan, Janak Singh, “Compact electrode design for accelerometer on SOI with refilled isolation trench,” Journal of Micromechanics and Microengineering, 21 (2011) 095005.

[11] Jin Xie*, Chengkuo Lee, Ming-Fang Wang and Hanhua Feng, ”Seal and Encapsulate Cavities for CMOS MEMS Thermoelectric Power Generators,” Journal of Vacuum Science & Technology B, v 29, issue 2, 021401, March 2011.

[10] Jin Xie*, Chengkuo Lee, Ming-Fang Wang, Julius Minglin Tsai,” Microstructures for Characterization of Seebeck Coefficient of Doped Polysilicon Films,” Microsystem Technologies, 17: 77-83, 2011.

[9] Bin Yang, Chengkuo Lee, R. K. Kotlanka, Jin Xie, Siak Piang Lim, “A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations,” Journal of Micromechanics and Microengineering. Vol. 20, 065017, 2010.

[8] Jin Xie*, Chengkuo Lee and Hanhua Feng, “Design, Fabrication and Characterization of CMOS MEMS based Thermoelectric Power Generators,” IEEE/ASME Journal of Microelectromechanical Systems, vol.19, no.2, April 2010.

[7] Jin Xie*, Chengkuo Lee, Ming-Fang Wang, Youhe Liu and Hanhua Feng, “Characterization of heavily doped polysilicon films for CMOS MEMS thermoelectric power generators,” Journal of Micromechanics and Microengineering, 19 (2009) 125029.

[6] Bin Yang, Chengkuo Lee, Wenfeng Xiang, Jin Xie, Han He, R. K. Kotlanka, Siew Ping Low and Hanhua Feng, “Electromagnetic energy harvesting from vibrations of multiple frequencies,” Journal of Micromechanics and Microengineering. Vol. 19, No.3, 035001, 2009.

[5] Chengkuo Lee and Jin Xie, “Design and optimization of wafer bonding packaged microelectromechanical systems thermoelectric power generators with heat dissipation path, ” Journal of Vacuum Science & Technology B, v 27, n 3, p 1267-71, May 2009.

[4] Chengkuo Lee, Ye Mei Lim, Bin Yang, Rama Krishna Kotlanka, Chun-Huat Heng, Johnny Han He, Min Tang, Jin Xie, Hanhua Feng, “Theoretical comparison of the energy harvesting capability among various electrostatic mechanisms from structure aspect,” Sensors and Actuators A (Physical), 156 (2009) 208–216.

[3] Jin Xie, Min Hu, Shih-Fu Ling and Hejun Du, “Fabrication and characterization of piezoelectric cantilever for micro transducers,” Sensors and Actuators A (Physical), v 126, n 1, p 182-6, 26 Jan. 2006.

[2] Min Hu, Hejun Du, Jin Xie and Shih-Fu Ling, “Control of an electrostrictive actuator using Newton's method,” Precision Engineering, v 29, n 3, p 375-80, July 2005.

[1] Ju Hua, Wang Wen, Xie Jin and Chen Zi-Chen. "Neural network approach for modification and fitting of digitized data in reverse engineering," Journal of Zhejiang University: Science, v 5, n 1, January, 2004, p 75-80

 

Conference papers:

[29] Xianhao Le, Jingtao Pang, Yixiang Wang and Jin Xie*, “A humidity sensor with high sensitivity and low temperature coefficient of frequency based on AlN surface acoustic wave and graphene oxide sensing layer”, TRANSDUCERS 2017, Kaohsiung, Taiwan, China, June 18-22, 2017

[28] Hong Ding, Yiming Ma and Jin Xie*, “A biaxial resonant tilt sensor with two-stage microleverage mechanisms”, TRANSDUCERS 2017, Kaohsiung, Taiwan, China, June 18-22, 2017

[27] Xianhao Le, Jin Xie*, “An AlN two-dimensional acoustic wave humidity sensor with graphene oxide as sensing layer”, IEEE MEMS Conference 2017, Las Vegas, America, January 22-26 2017, pp1060-1063

[26] Hong Ding, Jin Xie*, “An improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes”, IEEE MEMS Conference 2017, Las Vegas, America, January 22-26 2017, pp1099-1102

[25] Dongyang Chen, Jiuxuan Zhao, Yinshen Wang, Jin Xie*, “Electrostatic charge sensor based on micro resonator with sensing scheme of effective stiffness perturbation”, IEEE MEMS Conference 2017, Las Vegas, America, January 22-26 2017, pp1208-1211

[24] Qifeng Zhu, Tao Chen, Huicong Liu, Lining Sun, Tao Wang, Chengkuo Lee,Xianhao Le, Jin Xie,An AlN-based Piezoelectric Micro-machined Ultrasonic Transducer (pMUT) Array,IEEE Nano 2016, Sendai, Japan,22-25 August 2016. 

[23] Yixiang Wang, Hong Ding, Xianhao Le and Jin Xie*, A MEMS Piezoelectric In-plane Resonant Accelerometer with two-stage Micro-leverage Mechanism, 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016), April 17-20, Sendai, Japan,2016
[22] Hong Ding, Lifeng Fu and Jin Xie*, Resonant Frequency Tunable Silicon Fishbone-Shaped MEMS Double Ended Tuning Fork, 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2016), April 17-20, Sendai, Japan,2016

[21] Hong Ding, Jiuxuan Zhao, Bingfeng Ju and Jin Xie*, "A highly sensitive biaxial resonant accelerometer with two-stage microleverage mechanisms", IEEE MEMS Conference 2016, Shanghai, China, January 24-28 2016, pp934-937.

[20] Jiuxuan Zhao, Minliang Liu, Wen Wang and Jin Xie*,"Airborne particulate matter classification and concentration detection based on 3D printed virtual impactor and quartz crystal microbalance sensor", IEEE MEMS Conference 2016,Shanghai, China, January 24-28 2016, pp824-827.

[19] Jiuxuan Zhao, Hong Ding, Sheng Ni, Lifeng Fu, Wen Wang, and Jin Xie*,"High-resolution and large dynamic range electrometer with adjustable sensitivity based on micro resonator and electrostatic actuator",IEEE MEMS Conference 2016, Shanghai, China, January 24-28 2016, pp1074-1077.

[18] Hong Ding, Jiuxuan Zhao, Jin Xie*, "A Novel Biaxial Resonant Micro Accelerometer with Microleverage Mechanism",10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2015), April 7-11, Xi’an, China,2015

[17] Jiuxuan Zhao, Hong Ding, Jin Xie*, “Micromechanical Resonant Electrostatic Charge Sensor with Micro-Leverage Mechanisms", 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2015), April 7-11, Xi’an, China,2015

[16] Najar H.,Mei-Lin Chan, Jin Xie, Liwei Lin, Horsley D.A. "Impact of doping and microstructure on quality factor of CVD diamond micromechanical resonators", 2012 IEEE International conference of Frequency Control Symposium (FCS), May 2012,1-5, Baltimore, Maryland, USA, 2012

[15] M.L. Chan, Jin. Xie, P. Fonda, H. Hajar, K. Yamazaki, L. Lin and D.A. Horsley, "Micromachined Polycrystalline Diamond Hemispherical Shell Resonators," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshops), June 2012 , 355-358, SC USA ,2012.

[14] M.L. Chan, Jin. Xie, P. Fonda, H. Najar, L. Lin, K. Yamazaki and D.A. Horsley, “Micromachining 3D hemispherical features in silicon via micro electro discharge machining”, IEEE MEMS Conference 2012, Jan29-Feb3, 2012,289-292, Paris, France, 2012.

[13] Jin Xie*, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai and Nagarajan Ranganathan “Compact electrode design for accelerometer on SOI with refilled isolation trench”, TRANSDUCERS’11, p. 76-79, Beijing, China, June 5-9, 2011

[12] Jin Xie*, Chengkuo Lee, Ming-Fang Wang and Hanhua Feng, “A New Test Structure for Characterization of Seebeck Coefficient of Doped Polysilicon Films,” 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), p. 137-138, Perth, Australia, July 2010.

[11] Jin Xie*, Chengkuo Lee, Ming-Fang Wang and Hanhua Feng, “Wafer-Level Vacuum Sealing and Encapsulation for Fabrication of CMOS MEMS Thermoelectric Power Generators,” IEEE MEMS Conference 2010, p.1175-1178, Hong Kong, China, January 24 - 28 2010.

[10] Xiaojing Mu, Guangya Zhou, Aibin Yu, Jin Xie, Cheewei Tan, Weisheng Chen and Hanhua Feng, “A 3mm Endoscopic Probe with Integrated MEMS Micromirror for Optical Coherence Tomography Bioimaging,” Eurosensors 2010, Sept. 05-08, 2010, Linz, Austria.

[9] Ming-Fang Wang, Yingshun Xu, C. S. Premachandran, Kelvin Wei Sheng Chen, Jin Xie, “3D Scanning Micromirror Integrated Endoscopic Probe for Optical Coherence Tomography Bioimaging,” IEEE Engineering in Medicine and Biology Society (EMBC'10), Buenos Aires, Argentina, 1st - 4th September, 2010

[8] Chengkuo Lee and Jin Xie, “Development of vacuum packaged CMOS thermoelectric energy harvester,” 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2009), p 803-7, 2009

[7] Jin Xie and Chengkuo Lee, “Design and Modeling of Vacuum Packaged MEMS Thermoelectric Power Generator using Heat Dissipation Path,” The IEEE Intern. Conf. on Sustainable Energy Technologies (ICSET), p.605-608, Nov.24-27, 2008, Singapore.

[6] Bin Yang, C. Lee, Johnny Han He, Jin Xie, Rama Krishna Kotlanka, and Hanhua Feng, “Design, Simulation and Characterization of a Novel Multi-Frequency Energy Harvester,” Eurosensors 2008, p.1408-1411, Sept. 07-10, 2008, Dresden, Germany.

[5] Ye Mei Lim, Bin Yang, Rama Krishna Kotlanka, Chun Huat Heng, Jin Xie, Min Tang, Johnny He Han, Hanhua Feng and Chengkuo Lee, “Theoretical study of the output energy for various MEMS based electrostatic mechanisms,” The IEEE Intern. Conf. on Sustainable Energy Technologies (ICSET), p. 615-620, Nov. 24-27, 2008, Singapore.

[4] Ye Mei Lim, Rama Krishna Kotlanka, Bin Yang, Chun Huat Heng, Min Tang, Jin Xie, and Chengkuo Lee, “A comparison of the capability of harvesting energy from vibrations among various electrostatic mechanisms,” APCOT 2008 ( Asia-Pacific Conference On Transducers and Micro-Nano Technology 2008),  June 22-25,  2008, Tainan, Taiwan.

[3] Min Hu, Hejun Du, Jin Xie, Shih-Fu Ling and Yongqing Fu, “Fabrication of PZT microdevices using a high-yield sol-gel process,” Proceedings of the SPIE - The International Society for Optical Engineering, v 5650, n 1, p 180-8, 23 Feb. 2005, Sydney, Australia

[2] Min Hu, Jin Xie, Shih-Fu Ling, Hejun Du and Yongqing Fu, “Dynamic testing of micro devices using PZT base excitation,” Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2005, Singapore.

[1] Jin Xie*, Min Hu, Shih-Fu Ling and Hejun Du, “Fabrication and characterization of piezoelectric cantilever for micro transducers,” Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2005, Singapore.


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